- thin-film micromachining
- микромеханическая обработка тонких плёнок
The New English-Russian Dictionary of Radio-electronics. F.V Lisovsky . 2005.
thin-film micromachining
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Microthermoforming — is the abbreviation for microscopic or microscale thermoforming, or, more precisely, for thermoforming of microproducts or microstructure products. Microstructure products means products that have structures in the micrometre range and have their … Wikipedia
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Outline of nanotechnology — The following outline is provided as an overview of and topical guide to nanotechnology: Nanotechnology – study of physical phenomena on the nanoscale, dealing with things measured in nanometres, billionths of a meter. Contents 1 Branches of… … Wikipedia
Elektronenstrahllithografie — Die Elektronenstrahllithografie (ESL, englisch electron beam lithography oft als e beam lithography abgekürzt) ist in der Mikro und Halbleitertechnik ein spezielles Verfahren zur Strukturierung einer Elektronenstrahl empfindlichen Schicht… … Deutsch Wikipedia
